Low Cost cross table system

Cross table system for wafer processing with a very rigid and compact design as well as a cantilever wafer carrier within space-critical conditions. Further requirements were:

• Shortest cycle time rates with high dynamics
• No vibration input into the machine structure
• High repeatability and system accuracies
• Parallelism, flatness and angularity of the tables max. 0.02 mm
• Entire assembly in cleanroom-suitable design
• Function and quality assurance by suppliers

The specified performance data has been successfully implemented with the following technical measures:

• Rigidity and accuracy by using stainless steel precision miniature linearways
• Precisely and easy-running ballscrew
• Highly dynamic electric drive
• Manipulations on the workpiece by compressed air and evacuated systems
• All movements supervised by contactless sensor technology
• Bearings, ballscrew and linearways lubricated with appropriate clean room grease
• 100 % function control as well as examination of compressed air-, vacuum and sensor technology systems by application identically sequencing program (quantities up to 400/year)
• Tests including measuring protocol for flatness, parallelism and angularity