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Low Cost cross table systemRequirements:
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Low Cost cross table system
Cross table system for wafer processing with a very rigid and compact design as well as a cantilever wafer carrier within space-critical conditions. Further requirements were:
- Shortest cycle time rates with high dynamics
- No vibration input into the machine structure
- High repeatability and system accuracies
- Parallelism, flatness and angularity of the tables max. 0.02 mm
- Entire assembly in cleanroom-suitable design
- Function and quality assurance by suppliers
The specified performance data has been successfully implemented with the following technical measures:
- Rigidity and accuracy by using stainless steel precision miniature linearways
- Precisely and easy-running ballscrew
- Highly dynamic electric drive
- Manipulations on the workpiece by compressed air and evacuated systems
- All movements supervised by contactless sensor technology
- Bearings, ballscrew and linearways lubricated with appropriate clean room grease
- 100 % function control as well as examination of compressed air-, vacuum and sensor technology systems by application identically sequencing program (quantities up to 400/year)
- Tests including measuring protocol for flatness, parallelism and angularity
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