High Performance Turning & Lifting Unit

Compact two axis system for a combined turning and lifting movement with modular structure for a wet-chemical machining process with the following system-requirements:

• Compact design
• Uniform interface (mechanical/electrical)
• Highest rigidity against external changing dynamic effects
• True running accuracy of the turning unit in the micron range
• Special materials due to extremely aggressive media (acids,…)
• Suitable for cleanroom class 3 (ISO 14644-1: 1999)
• Reliability and stability
• Almost 100 % machine availability
• Easy to maintain

Due to FEM calculations an integral and compact system solution with very high rigidity was achieved:

• Cast body of compacted material
• Axis of rotation with ballscrew for vertical movement
• Special hybrid high precision bearings for rotary axis
• Hollow shaft direct drive and servo motor technology
• Preloaded linearways with stainless rollerways
• Special lubricant for all moving parts
• Special surface coating
• Vacuum chambers system for particle suppression
• 100 % function control and qualified test procedure