Customized solutions

High Speed Linear Motor System


  • Dynamics
  • Highest positioning accuracy
  • Structural rigidities
  • Smallest particle contamination

High Speed Linear Motor System

Linear motor system used as vertical axis in a semiconductor manufacturing machine for pick and place tasks for realization of excellent productivity and process security. Other demands were:

  • dynamics
  • highest positioning accuracy
  • structural rigidities
  • smallest particle contamination
  • compact design

The linear motor system was equipped for this application with the following characteristics and various accessories:

  • higher positioning accuracy
  • customized mounting hole pattern for slides and base plates
  • maintenance-free linear guiding system
  • clean room suitable execution
  • customized mechanical end stops
  • motor and feedback extension cables
  • parameter set for first start-up on electronic data medium