High Speed Linear Motor System

Linear motor system used as vertical axis in a semiconductor manufacturing machine for pick and place tasks for realization of excellent productivity and process security. Other demands were:

• dynamics
• highest positioning accuracy
• structural rigidities
• smallest particle contamination
• compact design

The linear motor system was equipped for this application with the following characteristics and various accessories:

• higher positioning accuracy
• customized mounting hole pattern for slides and base plates
• maintenance-free linear guiding system
• clean room suitable execution
• customized mechanical end stops
• motor and feedback extension cables
• parameter set for first start-up on electronic data medium