Customized solutions
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High Speed Linear Motor SystemRequirements:
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High Speed Linear Motor System
Linear motor system used as vertical axis in a semiconductor manufacturing machine for pick and place tasks for realization of excellent productivity and process security. Other demands were:
- dynamics
- highest positioning accuracy
- structural rigidities
- smallest particle contamination
- compact design
The linear motor system was equipped for this application with the following characteristics and various accessories:
- higher positioning accuracy
- customized mounting hole pattern for slides and base plates
- maintenance-free linear guiding system
- clean room suitable execution
- customized mechanical end stops
- motor and feedback extension cables
- parameter set for first start-up on electronic data medium
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