Customized solutions

XY-cross table for laser cutting system

Requirements:

  • Compact dimensions
  • High dynamics
  • High system and repetition accuracies
  • no backlash

XY-cross table for laser cutting system

Cross table for laser cuts system for ceramic plates in the semiconductor industry with high requirements regarding:

  • compact total dimensions
  • high dynamics
  • high system and repetition accuracies
  • no backlash
  • load-independent optimized synchronous operation characteristics
  • wear-resistant and non corrosive quality against very aggressive, ceramic cutting dust
  • plug-finished solution
  • execution of the function control by the supplier

The following focuses of the approach made a successful realization of the project possible:

  • optimizing geometrical structure
  • compact mechanical end stops
  • higher wear-resistant bellows covers
  • Air barrier sealing for complete capsulated system
  • application-optimized length measuring system with high basic accuracy
  • high performance linear motors with compact dimensions
  • Precision linear ways with special seals
  • extensive accessories, like e.g. energy chain and extension cable