XY-cross table for laser cutting system

Cross table for laser cuts system for ceramic plates in the semiconductor industry with high requirements regarding:

• compact total dimensions
• high dynamics
• high system and repetition accuracies
• no backlash
• load-independent optimized synchronous operation characteristics
• wear-resistant and non corrosive quality against very aggressive, ceramic cutting dust
• plug-finished solution
• execution of the function control by the supplier

The following focuses of the approach made a successful realization of the project possible:

• optimizing geometrical structure
• compact mechanical end stops
• higher wear-resistant bellows covers
• Air barrier sealing for complete capsulated system
• application-optimized length measuring system with high basic accuracy
• high performance linear motors with compact dimensions
• Precision linear ways with special seals
• extensive accessories, like e.g. energy chain and extension cable