XYZ-Linear Motor System for Die-Bonding

Customized linear motor system for maximum complex Pick and Place tasks with movements in three axes with these requirements:

• compact dimensions
• high dynamics to achieve short cycle times
• high system and repeatability within nanometer range
• resistant to high temperature of the system over a certain time interval
• the sag of the Z-axis execution must be prevented in case of a voltage failure
• clean room suitable version
• execution of the function and quality assurance by the supplier

To meet the requirements of the product concept catalogue the construction was arranged as follows:

• special geometrical dimensions
• structure by FEM (finite elements method) construed and optimized
• use of particularly coated composite materials
• use of clean room suitable materials and/or coatings
• temperature-compensated length measuring systems
• high performance linear motors with small heat dissipation
• magnetic mass balance in the Z-axis
• ultra precision linear ways with clean room grease filling
• work piece holding by compressed air and evacuated system